Structure of post - annealed ferroelectric PbZr Ti O and SrBi Ta O thin x 1 – x 3 2 2 9 films

نویسندگان

  • Jianxia Gao
  • Erjia Liu
  • Zhibin Zhang
  • Jianqing Cao
  • Aiping Zeng
چکیده

In order to fabricate good quality ferroelectric thin films, PbZr Ti O (PZT) and SrBi Ta O (SBT) films were fabricated x 1–x 3 2 2 9 ( ) on SiO ySi(100) substrates and on PtyTiy SiO ySi(100) substrates by pulsed laser excimer deposition (PLD). X-ray diffraction, 2 2 Rutherford backscattering analysis, and atomic force microscopy were used to characterize the structural properties of the samples, which were post-annealed at different temperatures. The results showed that the PZT and SBT films fabricated on PtyTiySiO y 2 Si(100) substrates and annealed at 700 8C exhibited optimum properties. 2002 Elsevier Science B.V. All rights reserved. PACS: 81.15.fg; 82.80.ej; 82.80.yc; 87.64.dz

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تاریخ انتشار 2003